Physical Property
Molecular Formular CHF3
Component Trifluoromethane
Molecular Weight 70.01
Boiling Point℃ -82.0
Critical Temperature℃ 25.9
Critical Pressure Mpa 4.84
GWP 14760
ODP 0
Quality Index
Purity％ ≧99.9
Moisture PPM ≦10
Acidity PPM ≦1.0
Vapor Residue PPM ≦0.01
Appearance Colorless. No visible turbidity
Odor No strange stench
H.S. Code 29033090.9
UN No. 1984
Class 2.2
Packing： Refillable steel cylinder 10L 40L 500L
Application:
Refrigerant and substitute for halon fire extinguishant; Used in plasma etching of silicon oxide or nitride layers.
Low- temperature refrigerant,ingredient for CCL4, streaming agent,plasma etching agent,supercritical extraction agent.
